In this work, we present the first demonstration of ultra-low losses of 2. 0dB/m in silicon nitride waveguides and ring resonators with Q = 11. 18 million, using a anneal-free process involving ICP-PECVD with deuterated silane as a precursor gas, with a maximum temperature of only. Planar waveguides, also called slab waveguides, are waveguides with a planar geometry, which guide light only in one dimension. They are often fabricated in the form of a thin transparent film with increased refractive index on some substrate, or possibly embedded between two substrate layers. Low Pressure Chemical Vapor deposited (LPCVD) Silicon Nitride core waveguides, with silicon dioxide upper and lower claddings, are one of the most. This article reports the recent progress in the optical waveguide technologies being developed to meet these needs. Introduction In addition to the recent spread of fiber-to-the-home services and the use of smartphones, the practical application of the Internet of Things (IoT) technology, in. An international research team has developed a method for fast fabrication of variable-cross-section waveguides for integrated photonics—potentially useful for on-chip functionalities such as mode conversion, polarization control and beam rotation.